UV Characteristics and Performance as Positive-Working Deep, Mid, and Near UV Resists of Phenyl Isopropenyl Ketone Copolymers
Sugita, Kazuyuki, Ueno, Nobuo, Harada, Kieko, Kushida, Masahito, Suzuki, Yasushi, Takeuchi, Yasunori, Guillet, JamesVolume:
25
Journal:
Polymer Journal
DOI:
10.1295/polymj.25.1059
Date:
October, 1993
File:
PDF, 936 KB
1993