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Carbon-hydrogen related defects in SiGe observed after dc H plasma treatment
Stübner, Ronald, Kolkovsky, Vladimir, Weber, Jörg, Abrosimov, Nikolay V.Volume:
214
Language:
english
Journal:
physica status solidi (a)
DOI:
10.1002/pssa.201700329
Date:
July, 2017
File:
PDF, 298 KB
english, 2017