Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2017 / 05 Vol. 35; Iss. 3
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Preparation and effects of O 2 flow on the electrical characteristics of Li doped MgZnO thin film transistors
Tian, Longjie, Gao, Song, Ma, Yaobin, Wang, Qi, Zhou, Dongzhan, Li, Ran, Zhang, Xiqing, Wang, YongshengVolume:
35
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4983086
Date:
May, 2017
File:
PDF, 1.13 MB
english, 2017