Theoretical study of surface interaction stresses considering one-dimensional material distributions in the in-plane direction based on the Lennard–Jones potential
Matsuoka, Hiroshige, Tanaka, Teppei, Fukui, ShigehisaLanguage:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-016-3194-7
Date:
November, 2016
File:
PDF, 1.30 MB
english, 2016