Preparation of tantalum oxynitride thin film photocatalysts...

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Preparation of tantalum oxynitride thin film photocatalysts by reactive magnetron sputtering deposition under high substrate temperature

Horiuchi, Yu, Mine, Shinya, Moriyasu, Madoka, Anpo, Masakazu, Kim, Tae-Ho, Matsuoka, Masaya
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Language:
english
Journal:
Research on Chemical Intermediates
DOI:
10.1007/s11164-017-3040-2
Date:
July, 2017
File:
PDF, 1.14 MB
english, 2017
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