Piezoresistive pressure sensor with high sensitivity for medical application using peninsula-island structure
Xu, Tingzhong, Wang, Hongyan, Xia, Yong, Zhao, Zhiming, Huang, Mimi, Wang, Jiuhong, Zhao, Libo, Zhao, Yulong, Jiang, ZhuangdeLanguage:
english
Journal:
Frontiers of Mechanical Engineering
DOI:
10.1007/s11465-017-0447-9
Date:
July, 2017
File:
PDF, 3.13 MB
english, 2017