Automatic Microwave Tuner for Plasma Deposition Applications Using a Gradient Search Method
Chtcherbakov, A. A., Swart, R. L.Volume:
32
Language:
english
Journal:
Journal of Microwave Power and Electromagnetic Energy
DOI:
10.1080/08327823.1997.11688320
Date:
January, 1997
File:
PDF, 1.92 MB
english, 1997