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Experimental benchmark of kinetic simulations of capacitively coupled plasmas in molecular gases
Donko, Zoltan, Derzsi, Aranka, Korolov, Ihor, Hartmann, Peter, Brandt, Steven William, Schulze, Julian, Berger, Birk, Koepke, Mark E, Bruneau, Bastien, Johnson, Erik V, Lafleur, Trevor, Booth, Jean PaLanguage:
english
Journal:
Plasma Physics and Controlled Fusion
DOI:
10.1088/1361-6587/aa8378
Date:
August, 2017
File:
PDF, 2.34 MB
english, 2017