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Round-robin test for the measurement of layer thickness of multilayer films by secondary ion mass spectrometry depth profiling
Kim, Kyung Joong, Jang, Jong Shik, Bennett, Joe, Simons, David, Barozzi, Mario, Takano, Akio, Li, Zhanping, Magee, CharlesLanguage:
english
Journal:
Surface and Interface Analysis
DOI:
10.1002/sia.6277
Date:
July, 2017
File:
PDF, 477 KB
english, 2017