[IEEE 2017 Symposium on Design, Test, Integration and...

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[IEEE 2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) - Bordeaux, France (2017.5.29-2017.6.1)] 2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) - Relative humidity effect on pull-off forces in MEMS flexible structures measured by AFM

Birleanu, Corina, Pustan, Marius, Rusu, Florina, Dudescu, Cristian, Muller, Raluca, Baracu, Angela
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Year:
2017
Language:
english
DOI:
10.1109/DTIP.2017.7984478
File:
PDF, 1.05 MB
english, 2017
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