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Dynamic Matching System for Radio-Frequency Plasma Generation
Al Bastami, Anas, Jurkov, Alexander, Gould, Parker, Hsing, Mitchell, Schmidt, Martin, Ha, Jung-Ik, Perreault, David J.Year:
2017
Language:
english
Journal:
IEEE Transactions on Power Electronics
DOI:
10.1109/TPEL.2017.2734678
File:
PDF, 3.47 MB
english, 2017