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[ASME ASME 2016 11th International Manufacturing Science and Engineering Conference - Blacksburg, Virginia, USA (Monday 27 June 2016)] Volume 1: Processing - Scalable Plasmonic Nanolithography: Prototype System Design and Construction
Wang, Yuan, Saad, Mohamed E., Ni, Kang, Chang, Yen Chi, Chen, Cheng-Wei, Chen, Chen, Pan, Liang, Tsao, Tsu Chin, Lavine, Adrienne S., Bogy, David B., Zhang, XiangYear:
2016
Language:
english
DOI:
10.1115/msec2016-8671
File:
PDF, 2.17 MB
english, 2016