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Transient behavior and dynamic pull-in instability of electrostatically-actuated fluid-conveying microbeams
Lotfi, Maedeh, Moghimi Zand, Mahdi, Isaac Hosseini, Imman, Baghani, Mostafa, Dargazany, RoozbehLanguage:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-017-3503-9
Date:
August, 2017
File:
PDF, 1.95 MB
english, 2017