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Microelectronic Engineering 2017 / 8

Large area thermal nanoimprint below the glass transition temperature via small amplitude oscillatory shear forming

Brazil, Owen, Usov, Victor, Pethica, John B., Cross, Graham L.W.
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Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2017.08.002
Date:
August, 2017
File:
PDF, 1.55 MB
english, 2017
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