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[IEEE 2017 International Conference on Applied System Innovation (ICASI) - Sapporo, Japan (2017.5.13-2017.5.17)] 2017 International Conference on Applied System Innovation (ICASI) - Deposition of AlN thin films on LiTaO3 substrates
Chang, Yu-Chen, Chen, Ying-Chung, Kao, Kuo-Sheng, Cheng, Chien-Chuan, Chang, Wei-Tsai, Shih, Wei-Che, Lin, Shang-Huai, Lin, Jyun-MinYear:
2017
Language:
english
DOI:
10.1109/icasi.2017.7988566
File:
PDF, 603 KB
english, 2017