4H-SiC Defects Evolution by Thermal Processes

Materials Science Forum 2017 / 5 Vol. 897

4H-SiC Defects Evolution by Thermal Processes

Piluso, Nicolò, di Stefano, Maria Ausilia, Lorenti, Simona, La Via, Francesco
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Volume:
897
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.897.181
Date:
May, 2017
File:
PDF, 752 KB
english, 2017
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