150mm Silicon Carbide Selective Embedded Epitaxial Growth...

Materials Science Forum 2017 / 5 Vol. 897

150mm Silicon Carbide Selective Embedded Epitaxial Growth Technology by CVD

Hara, Kazukuni, Fujibayashi, Hiroaki, Takeuchi, Yuuichi, Omae, Shoichiro
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Volume:
897
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.897.43
Date:
May, 2017
File:
PDF, 1.86 MB
english, 2017
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