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About the influence of deposited nitride layers on oxide precipitation after RTA pre-treatment
Kissinger, Gudrun, Kot, Dawid, Dabrowski, Jaroslaw, Grabolla, Thomas, Müller, Timo, Sattler, AndreasVolume:
214
Language:
english
Journal:
physica status solidi (a)
DOI:
10.1002/pssa.201700236
Date:
July, 2017
File:
PDF, 1.28 MB
english, 2017