Deposition of silicon oxycarbide thin films from an...

Deposition of silicon oxycarbide thin films from an organosilicon source for polycarbonate glazing

Lee, Sung-Eun, Park, Young-Chun
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Volume:
638
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2017.08.007
Date:
September, 2017
File:
PDF, 1.71 MB
english, 2017
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