Slope and amplitude asymmetry effects on low frequency...

Journal of Applied Physics 2016 / 04 Vol. 119; Iss. 16

Slope and amplitude asymmetry effects on low frequency capacitively coupled carbon tetrafluoride plasmas

Bruneau, B., Korolov, I., Lafleur, T., Gans, T., O'Connell, D., Greb, A., Derzsi, A., Donkó, Z., Brandt, S., Schüngel, E., Schulze, J., Johnson, E., Booth, J.-P.
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Volume:
119
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4947453
Date:
April, 2016
File:
PDF, 2.38 MB
english, 2016
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