Suppressed Fin-LER Induced Variability in Negative...

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IEEE Electron Device Letters 2017

Suppressed Fin-LER Induced Variability in Negative Capacitance FinFETs

Lee, Ho-Pei, Su, Pin
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Year:
2017
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/LED.2017.2737025
File:
PDF, 536 KB
english, 2017
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