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A Piezoelectric Twisting Beam Actuator
Grinberg, Inbar, Maccabi, Nadav, Kassie, Adne, Elata, DavidYear:
2017
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2017.2731120
File:
PDF, 2.19 MB
english, 2017