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Poly(isobornyl methacrylate-co-3-(t-butoxycarbonyl)-1-vinyl-2-caprolactam) for an Environmentally Stable Chemically Amplified Resist
Kim, Jin-Baek, Choi, Jae-Hak, Kim, Hyunwoo, Kwon, Young-Gil, Jung, Min-HoVolume:
31
Journal:
Polymer Journal
DOI:
10.1295/polymj.31.695
Date:
September, 1999
File:
PDF, 829 KB
1999