Nonlinearity measurement for low-pressure encapsulated MEMS...

Mechanical Systems and Signal Processing 2018 / 02 Vol. 100

Nonlinearity measurement for low-pressure encapsulated MEMS gyroscopes by transient response

Wei, Yumiao, Dong, Yonggui, Huang, Xianxiang, Zhang, Zhili
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Volume:
100
Language:
english
Journal:
Mechanical Systems and Signal Processing
DOI:
10.1016/j.ymssp.2017.07.034
Date:
February, 2018
File:
PDF, 4.67 MB
english, 2018
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