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Temperature dependent optical constants for SiO 2 film on Si substrate by ellipsometry
Gong, Junbo, Dai, Ruchen, Wang, Zhongping, Zhang, Chuanchao, Yuan, Xiaodong, Zhang, ZengmingVolume:
4
Language:
english
Journal:
Materials Research Express
DOI:
10.1088/2053-1591/aa7d17
Date:
August, 2017
File:
PDF, 754 KB
english, 2017