SPIE Proceedings [SPIE SPIE Optical Metrology - Munich, Germany (Sunday 25 June 2017)] Modeling Aspects in Optical Metrology VI - Digital micromirror device as amplitude diffuser for multiple-plane phase retrieval
Bodermann, Bernd, Frenner, Karsten, Silver, Richard M., Abregana, Timothy Joseph T., Hermosa, Nathaniel P., Almoro, Percival F.Volume:
10330
Year:
2017
Language:
english
DOI:
10.1117/12.2270182
File:
PDF, 576 KB
english, 2017