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AIP Conference Proceedings [AIP ION IMPLANTATION TECHNOLOGY 2012: Proceedings of the 19th International Conference on Ion Implantation Technology - Valladolid, Spain (25–29 June 2012)] - Pattern effect reduction for spike anneals with different heating approaches in RTP systems
Hamm, Silke, Cosceev, Alexandr, Timans, Paul, Lee, Young, Xing, GaryYear:
2012
Language:
english
DOI:
10.1063/1.4766509
File:
PDF, 959 KB
english, 2012