AIP Conference Proceedings [AIP ION IMPLANTATION TECHNOLOGY 2012: Proceedings of the 19th International Conference on Ion Implantation Technology - Valladolid, Spain (25–29 June 2012)] - Change of fluorine distribution depending on multi-implant conditions
Sano, Makoto, Morita, Takao, Fuse, GenshuYear:
2012
Language:
english
DOI:
10.1063/1.4766502
File:
PDF, 861 KB
english, 2012