![](/img/cover-not-exists.png)
ZnO thin film piezoelectric micromachined microphone with symmetric composite vibrating diaphragm
Li, Junhong, Wang, Chenghao, Ren, Wei, Ma, JunVolume:
26
Language:
english
Journal:
Smart Materials and Structures
DOI:
10.1088/1361-665X/aa6ae9
Date:
May, 2017
File:
PDF, 3.71 MB
english, 2017