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SPIE Proceedings [SPIE SPIE Microtechnologies - Barcelona, Spain (Monday 8 May 2017)] Smart Sensors, Actuators, and MEMS VIII - Thin film system with integrated load and temperature sensors for the technical application in deep drawing process
Fonseca, Luis, Prunnila, Mika, Peiner, Erwin, Biehl, Saskia, Paetsch, Nancy, Meyer-Kornblum, EikeVolume:
10246
Year:
2017
Language:
english
DOI:
10.1117/12.2265694
File:
PDF, 656 KB
english, 2017