A kinetics model for MOCVD deposition of AlN film based on...

  • Main
  • 2017 / 8
  • A kinetics model for MOCVD deposition of AlN film based on...
Journal of Crystal Growth 2017 / 8

A kinetics model for MOCVD deposition of AlN film based on Grove theory

Pu, Kaiwen, Dai, Xianying, Miao, Dongming, Wu, Shujing, Zhao, Tianlong, Hao, Yue
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Language:
english
Journal:
Journal of Crystal Growth
DOI:
10.1016/j.jcrysgro.2017.08.012
Date:
August, 2017
File:
PDF, 693 KB
english, 2017
Conversion to is in progress
Conversion to is failed