A new poly-Si TFT to improve surface roughness at poly-oxide/poly-Si interface
Min, Byung-Hyuk, Park, Cheol-Min, Yoo, Juhn-Suk, Han, Min-KooVolume:
T69
Language:
english
Journal:
Physica Scripta
DOI:
10.1088/0031-8949/1997/T69/047
Date:
January, 1997
File:
PDF, 533 KB
english, 1997