[IEEE 2017 19th International Conference on Solid-State...

  • Main
  • [IEEE 2017 19th International...

[IEEE 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Kaohsiung, Taiwan (2017.6.18-2017.6.22)] 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - 250°C wafer-level vacuum sealing using electroplated copper bonding frame planarized by fly-cutting

Farisi, Muhammad Salman Al, Tanaka, Koki, Hirano, Hideki, Tanaka, Shuji
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Year:
2017
Language:
english
DOI:
10.1109/TRANSDUCERS.2017.7994267
File:
PDF, 1.95 MB
english, 2017
Conversion to is in progress
Conversion to is failed