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[IEEE 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Kaohsiung, Taiwan (2017.6.18-2017.6.22)] 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - 250°C wafer-level vacuum sealing using electroplated copper bonding frame planarized by fly-cutting
Farisi, Muhammad Salman Al, Tanaka, Koki, Hirano, Hideki, Tanaka, ShujiYear:
2017
Language:
english
DOI:
10.1109/TRANSDUCERS.2017.7994267
File:
PDF, 1.95 MB
english, 2017