Large-Scale and High-Density pMUT Array Based on Isolated...

Journal of The Electrochemical Society 2017 Vol. 164; Iss. 7

Large-Scale and High-Density pMUT Array Based on Isolated Sol-Gel PZT Membranes for Fingerprint Imaging

Chen, Yuan-Quan, Li, Yu-Xing, Chen, Yan, Ju, Zhen-Yi, Tao, Lu-Qi, Pang, Yu, Yang, Yi, Ren, Tian-ling
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Volume:
164
Year:
2017
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/2.0891707jes
File:
PDF, 876 KB
english, 2017
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