Contact hole shrink and multiplication by directed...

MRS Proceedings 2015 Vol. 1750

Contact hole shrink and multiplication by directed self-assembly of block copolymers: from material to integration

Tiron, Raluca, Chevalier, Xavier, Gharbi, Ahmed, Argoud, Maxime, Pimenta-Barros, Patricia, Maret, Mireille, Gergaud, Patrice, Terlier, Tanguy, Barnes, Jean-Paul, Navarro, Christophe, Fleury, Guillaume
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Volume:
1750
Year:
2015
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/opl.2015.249
File:
PDF, 32.81 MB
english, 2015
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