Correlation between stoichiometry and properties of scandium oxide films prepared by reactive magnetron sputtering
Belosludtsev, Alexandr, Juškevičius, Kęstutis, Ceizaris, Lukas, Samuilovas, Romanas, Stanionytė, Sandra, Jasulaitienė, Vitalija, Kičas, SimonasLanguage:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2017.08.068
Date:
August, 2017
File:
PDF, 1.25 MB
english, 2017