Etching Kinetics of (100) Single Crystal Diamond Surfaces...

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physica status solidi (a) 2017 / 08

Etching Kinetics of (100) Single Crystal Diamond Surfaces in a Hydrogen Microwave Plasma, Studied with In Situ Low-Coherence Interferometry

Yurov, Vladimir, Bushuev, Egor, Bolshakov, Andrey, Ashkinazi, Evgeny, Antonova, Irina, Zavedeev, Evgeny, Khomich, Andrey, Voronov, Valery, Ralchenko, Victor
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Language:
english
Journal:
physica status solidi (a)
DOI:
10.1002/pssa.201700177
Date:
August, 2017
File:
PDF, 1.52 MB
english, 2017
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