Room-temperature transfer bonding of lithium niobate thin...

  • Main
  • 2017 / 8
  • Room-temperature transfer bonding of lithium niobate thin...
Sensors and Actuators A: Physical 2017 / 8

Room-temperature transfer bonding of lithium niobate thin film on micromachined Si substrate with Au microbumps

Takigawa, Ryo, Higurashi, Eiji, Suga, Tadatomo, Kawanishi, Tetsuya
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2017.08.015
Date:
August, 2017
File:
PDF, 232 KB
english, 2017
Conversion to is in progress
Conversion to is failed