UV-TiO 2 photocatalysis assisted chemical mechanical polishing 4H-SiC wafer
Yuan, Zewei, He, Yan, Sun, Xingwei, Wen, QuanLanguage:
english
Journal:
Materials and Manufacturing Processes
DOI:
10.1080/10426914.2017.1364855
Date:
August, 2017
File:
PDF, 1.81 MB
english, 2017