Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2016 / 11 Vol. 34; Iss. 6
Source imperfection impacts on optical proximity correction
Melvin, Lawrence S., Isoyan, Artak, Sawh, Chander, Huang, JenshengVolume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4967926
Date:
November, 2016
File:
PDF, 2.80 MB
english, 2016