Development and Characterization of AlOx/SiNx :B Layer...

Development and Characterization of AlOx/SiNx :B Layer Systems for Surface Passivation and Local Laser Doping

Norouzi, Mohammad H., Saint-Cast, Pierre, Jaeger, Ulrich, Steinhauser, Bernd, Benick, Jan, Buechler, Andreas, Bitnar, Bernd, Palinginis, Phedon, Neuhaus, Holger, Wolf, Andreas, Hofmann, Marc
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Volume:
7
Language:
english
Journal:
IEEE Journal of Photovoltaics
DOI:
10.1109/JPHOTOV.2017.2719278
Date:
September, 2017
File:
PDF, 1.87 MB
english, 2017
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