Development and Characterization of AlOx/SiNx :B Layer Systems for Surface Passivation and Local Laser Doping
Norouzi, Mohammad H., Saint-Cast, Pierre, Jaeger, Ulrich, Steinhauser, Bernd, Benick, Jan, Buechler, Andreas, Bitnar, Bernd, Palinginis, Phedon, Neuhaus, Holger, Wolf, Andreas, Hofmann, MarcVolume:
7
Language:
english
Journal:
IEEE Journal of Photovoltaics
DOI:
10.1109/JPHOTOV.2017.2719278
Date:
September, 2017
File:
PDF, 1.87 MB
english, 2017