Synthesis of Zr-N Thin Film by Reactive Ion Beam Sputtering

Japanese Journal of Applied Physics 1993 / 2 Vol. 32; Iss. Part 1, No

Synthesis of Zr-N Thin Film by Reactive Ion Beam Sputtering

Yoshitake, Masaaki, Yotsuya, Tsutom, Takiguchi, Katsumi, Ogawa, Soichi
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Volume:
32
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.1031
Date:
February, 1993
File:
PDF, 60 KB
1993
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