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Synthesis of Zr-N Thin Film by Reactive Ion Beam Sputtering
Yoshitake, Masaaki, Yotsuya, Tsutom, Takiguchi, Katsumi, Ogawa, SoichiVolume:
32
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.1031
Date:
February, 1993
File:
PDF, 60 KB
1993