Thermodynamic study and preparation of Si–B–N ceramic...

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Journal of Materials Research 2017 / 8

Thermodynamic study and preparation of Si–B–N ceramic coating by LPCVD from SiCl4–NH3–BCl3–H2–Ar system

Li, Jianping, Cheng, Laifei, Ye, Fang, Liu, Yongsheng, Zhu, Yan, Zhang, Litong
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Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/jmr.2017.323
Date:
August, 2017
File:
PDF, 617 KB
english, 2017
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