High mobility transparent conductive Al-doped ZnO thin films by atomic layer deposition
Lin, Man-Ling, Huang, Jheng-Ming, Ku, Ching-Shun, Lin, Chih-Ming, Lee, Hsin-Yi, Juang, Jenh-YihLanguage:
english
Journal:
Journal of Alloys and Compounds
DOI:
10.1016/j.jallcom.2017.08.207
Date:
August, 2017
File:
PDF, 4.41 MB
english, 2017