Express in-situ measurement of...

EPJ Web of Conferences 2017 Vol. 149

Express in-situ measurement of single crystal diamond growth/etching rate in microwave plasma: how to perform multiparametric kinetics study in one working day

Ralchenko, V.G., Yurov, V.Yu., Bushuev, E.V., Bolshakov, A.P., Ashkinazi, E.E., Antonova, I.A., Zavedeev, E.V., Khomich, A.A., Konov, V.I., Litvak, A.G.
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Volume:
149
Year:
2017
Language:
english
Journal:
EPJ Web of Conferences
DOI:
10.1051/epjconf/201714902001
File:
PDF, 622 KB
english, 2017
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