Reactive Bipolar Pulsed Dual Magnetron Sputtering of ZrN films: The effect of duty cycle
Rizzo, A., Valerini, D., Capodieci, L., Mirenghi, L., Di Benedetto, F., Protopapa, M.L.Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2017.08.032
Date:
August, 2017
File:
PDF, 544 KB
english, 2017