Designing Block Copolymers for Nanolithography using Mesoscale Modeling: Line-Space Graphoepitaxy
Ginzburg, Valeriy V., Hustad, Phillip D., Millward, Dan B., Trefonas, PeterVolume:
1
Year:
2016
Journal:
MRS Advances
DOI:
10.1557/adv.2016.93
File:
PDF, 570 KB
2016