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Experimental and modeling study on the role of Ar addition to the working gas on the development of intrinsic stress in TiN coatings produced by filtered vacuum-arc plasma
Vasyliev, V.V., Kalinichenko, A.I., Reshetnyak, E.N., Taghavi Pourian Azar, G., Ürgen, M., Strel'nitskij, V.E.Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2017.08.033
Date:
August, 2017
File:
PDF, 673 KB
english, 2017