Effects of a chirped bias voltage on ion energy...

Effects of a chirped bias voltage on ion energy distributions in inductively coupled plasma reactors

Lanham, Steven J., Kushner, Mark J.
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Volume:
122
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4993785
Date:
August, 2017
File:
PDF, 4.46 MB
english, 2017
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