Imprinting of double-sided microstructures with rapid induction heating and gas-assisted pressuring
Shih, Yang-Min, Kao, Ching-Chieh, Ke, Kun-Cheng, Yang, Sen-YeuVolume:
27
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/aa7acd
Date:
September, 2017
File:
PDF, 6.22 MB
english, 2017